Ion Beam High-Voltage Power Supplies

The performance and quality demands asked of power supplies used for ion implantation within the semiconductor device fabrication, metal finishing, as well as in materials science research markets are unrivaled. The power supplies and technologies employed within our family of supplies offers the performance and quality required to meet the demanding requirements of these applications.

Excelitas Ion-Beam High Voltage Power Supply Family

Product List

Part Number

S25-250

-25 kV, 250 W Electron Suppression Supply

The -25 kilovolt, 10 mA 250 watt power supply incorporates a high frequency quasi-resonant switch-mode design utilizing an IGBT based power inverter with a completely air insulated high voltage section. The fault tolerant design of this system offers open and short circuit protection. Low stored energy, a benefit of the high frequency switching design, provides fast response to transients and enhanced protection for the load and equipment operators.

Part Number

S40-1K

-40 kV, 1 kW Electron Suprression Supply

The -40 kilovolt, 25 mA 1 kilowatt power supply incorporates a high frequency quasi-resonant switch-mode design utilizing an IGBT based power inverter with a completely air insulated high voltage section. The fault tolerant design of this system offers open and short circuit protection. Low stored energy, a benefit of the high frequency switching design, provides fast response to transients and enhanced protection for the load and equipment operators.

Part Number

S40-500

-40 kV, 500 W Electron Suppression Supply

The -40 kilovolt, 12.5 mA 500 watt power supply incorporates a high frequency quasi-resonant switch-mode design utilizing an IGBT based power inverter with a completely air insulated high voltage section. The fault tolerant design of this system offers open and short circuit protection. Low stored energy, a benefit of the high frequency switching design, provides fast response to transients and enhanced protection for the load and equipment operators.