Mag.x System 125 High-Resolution, Wide-Field Microscope Inspection System

mag.x 125 Widefield Microscope System

Evolving from our Qioptiq® heritage for optical excellence, the mag.x system 125 represents a new class of optical systems that enable microscope-like resolution with wide fields-of-view supporting modern high resolution sensors up to 57 mm diameter. The variable system is fully modular and ideally suited for submicron imaging in inspection and measurement applications. The modular approach enables adaptation of the system to many applications ranging from a straight forward optical system without illumination to a full featured system including coaxial illumination and closed-loop autofocus.

High-resolution imaging across a wide field-of-view

With integrable autofocus modules, mag.x system 125 fulfills the most demanding inspection tasks in the automated industrial environment. Various inspection applications benefit from the "closed-loop" autofocus solution to increase their cycle times and thus their throughput.

mag.x 125 LensesHigh resolution inspection is being used in many applications. Each application has its own requirements and constraints. In order to cater for all these diverse needs, the mag.x system 125 is as modular as they come. Integration of customized elements is easy and enables a system that integrates seamlessly into the surrounding equipment. The mag.x 125 system can be combined with our range of objective lenses, tube lenses, illumination tubes, autofocus modules, mounting plates and other accessories to meet your application needs. Learn more by visiting our Qioptiq-Shop.

Our Quality Criteria:
  • Precision engineering with innovative optical design
  • Exact telecentricity on object and image side
  • Diffraction limited optical performance over complete image circle
  • Precise and dynamic autofocus
Ideal Applications:

Inspection and processing of semiconductor, flat-panel display (TFT & OLED) and printed circuit boards (PCB), micro measurement & metrology, MEMS & nanotechnology, fluorescence microscopy, digital pathology and many more.

Objective Plan Apochromat

Tube Lens System

1x

1.73x

2.25x

f'tub = 250 mm

f'tub = 432.5 mm

f'tub = 563 mm

2y' = 25 mm

2y' = 43.3 mm

2y' = 57 mm

 

WD

f'obj

δ

R0

M

2y

mm

NA'

R'0

lp/mm

M

2y

mm

NA'

R'0

lp/mm

M

2y

mm

NA'

R'0

lp/mm

Magn./NA

mm

mm

µm

lp/mm

2x/0.08

24.8

125

± 42.7

293

2.0

12.5

0.04

147

3.5

12.5

0.023

85

4.5

12.5

0.018

65

5x/0.2

13.0

50

± 6.8

733

5.0

5.0

0.04

147

8.7

5.0

0.023

85

11.25

5.0

0.018

65

NA    Numerical aperture in the object space = n · sin (σ) 
WD   Working distance
f'obj   Focal length of the objective
f'tub   Focal length of the tube lens
δobj   Depth of field at 546 nm δobj = ±n · λ/(2 · NA2)   
R'0     Cut-off frequency in image space at 546 nm
R0      Cut-off frequency in object space at 546 nm; R0 = (2 · NA) / λ
2y'    Image field size (maximum detector diagonal)
2y     Object field size
M      Magnification of the overall system; M = Mobj · Mtub
View the mag.x brochure under the Documentation tab for further details and reference to this chart. 

Objective Plan Apochromat

Tube Lens System

1x

1.73x

2.25x

f'tub = 250 mm

f'tub = 432.5 mm

f'tub = 563 mm

2y' = 25 mm

2y' = 43.3 mm

2y' = 57 mm

 

WD

f'obj

δ

R0

M

2y

mm

NA'

R'0

lp/mm

M

2y

mm

NA'

R'0

lp/mm

M

2y

mm

NA'

R'0

lp/mm

Magn./NA

mm

mm

µm

lp/mm

2x/0.08

24.8

125

± 42.7

293

2.0

12.5

0.04

147

3.5

12.5

0.023

85

4.5

12.5

0.018

65

5x/0.2

13.0

50

± 6.8

733

5.0

5.0

0.04

147

8.7

5.0

0.023

85

11.25

5.0

0.018

65

NA    Numerical aperture in the object space = n · sin (σ) 
WD   Working distance
f'obj   Focal length of the objective
f'tub   Focal length of the tube lens
δobj   Depth of field at 546 nm δobj = ±n · λ/(2 · NA2)   
R'0     Cut-off frequency in image space at 546 nm
R0      Cut-off frequency in object space at 546 nm; R0 = (2 · NA) / λ
2y'    Image field size (maximum detector diagonal)
2y     Object field size
M      Magnification of the overall system; M = Mobj · Mtub
View the mag.x brochure under the Documentation tab for further details and reference to this chart. 
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